827 |
AMAT, 0010-59796, 300MM PRODUCER CERAMIC HEATER
|
10-10 |
24 |
826 |
AMAT, 0010-59788, 300mm Producer Ceramic Heater(APF)
|
10-10 |
20 |
825 |
AMAT, 0021-27883, COVER SLIT
|
04-03 |
753 |
824 |
LAM, 839-044692-002, Liner housing
|
04-03 |
674 |
823 |
LAM, 715-104664-001, Baffle
|
04-03 |
610 |
822 |
LAM, 715-088776-004, Lower Electrode Plate
|
04-03 |
366 |
821 |
LAM, 715-066095-203, Upper electrode return
|
04-03 |
370 |
820 |
LAM, 715-066095-202, Lower electrode return
|
04-03 |
336 |
819 |
LAM, 715-044691-004, Liner spacer
|
04-03 |
388 |
818 |
LAM, 715-044691-002, Lower liner
|
04-03 |
438 |
817 |
LAM, 715-042721-866, Chamber Liner
|
04-03 |
337 |
816 |
LAM, 715-042721-009, Chamber Liner
|
04-03 |
358 |
815 |
LAM, 715-027638-814, CHMBR, TOP PC, 2300 MTL/PLY
|
04-03 |
342 |
814 |
LAM, 715-027638--014, Top Chamber
|
04-03 |
344 |
813 |
LAM, 714-045744-008, LINER, CANTILEVER, OUTER LNR MNT, 2300
|
04-03 |
368 |