|
660 |
AMAT, 0021-10219, Lid handle mount
 |
03-12 |
1852 |
|
659 |
AMAT, 0040-32676, Lid handle
|
03-12 |
1792 |
|
658 |
AMAT, 0010-30366, Assy tower small
|
03-12 |
1812 |
|
657 |
AMAT, 0010-30365, Assy tower Large
|
03-12 |
1891 |
|
656 |
AMAT, 0040-32680, Chamber lid
|
03-12 |
1943 |
|
655 |
AMAT, 0190-28684, Liner teflon ring
|
03-12 |
2146 |
|
654 |
AMAT, 0020-34695, LINER CATHOD FULL FLOW OXIDE ETCH
|
03-12 |
2082 |
|
653 |
AMAT, 0040-02609, Lower liner with magnet
|
03-12 |
2036 |
|
652 |
AMAT, 0040-33998, Process outer can
|
03-12 |
2129 |
|
651 |
AMAT, 0021-06092, Slit valve liner door
|
03-12 |
2089 |
|
650 |
AMAT, 0040-31942, MXP+ Chamber body
|
03-12 |
2155 |
|
649 |
AMAT, 0020-33164, HOUSING, THROTTLE VALVE, METCH MXP CENTURA
|
03-12 |
1984 |
|
648 |
AMAT, 0200-39361, ISOLATOR SILANE PUMPING RING PRODUCER
|
03-12 |
1980 |
|
647 |
LAM, 715-011001-002, HOUSING UPPER REACTION CHAMBER
|
03-12 |
1981 |
|
646 |
AMAT, 0021-10223, Outer chamber liner
|
03-12 |
1976 |
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