637 |
AMAT, 0020-34173, Side cover
|
03-12 |
808 |
636 |
AMAT, 0040-31886, Right rear shield
|
03-12 |
796 |
635 |
AMAT, 0040-31887, Right rear shield
|
03-12 |
799 |
634 |
AMAT, 0040-31889, Left side shield
|
03-12 |
795 |
633 |
AMAT, 0040-31888, Left rear shield
|
03-12 |
819 |
632 |
AMAT, 0040-39291, Front shield
|
03-12 |
828 |
631 |
AMAT, 0040-31890, Front cover shield
|
03-12 |
892 |
630 |
AMAT, 0015-09417, Clamp lid fins
|
03-12 |
952 |
629 |
AMAT, 0200-01284, SHADOW RING, STEPPED, QUARTZ, 300MM EMAX
|
10-13 |
1155 |
628 |
AMAT, 0200-01797, INSERT RING, NM, 300MM EMAX
|
10-13 |
1079 |
627 |
AMAT, 0200-01321, SHADOW RING, INSERT, 45 DEGREE, RA63, QU
|
10-13 |
1086 |
626 |
LAM, 715-031454-001, Side plate
|
10-06 |
1063 |
625 |
LAM, 715-028459-001, Lower Seal Plate
|
10-06 |
1020 |
624 |
LAM, 715-330834-001, HSG, LWR reaction chamber
|
10-06 |
1001 |
623 |
LAM, 16-435080-00, SHWRHD, 300MM, 15 INCH, TC, TAPERED
|
09-07 |
1023 |