660 |
AMAT, 0021-10219, Lid handle mount
|
03-12 |
1954 |
659 |
AMAT, 0040-32676, Lid handle
|
03-12 |
1930 |
658 |
AMAT, 0010-30366, Assy tower small
|
03-12 |
1935 |
657 |
AMAT, 0010-30365, Assy tower Large
|
03-12 |
2038 |
656 |
AMAT, 0040-32680, Chamber lid
|
03-12 |
2082 |
655 |
AMAT, 0190-28684, Liner teflon ring
|
03-12 |
2278 |
654 |
AMAT, 0020-34695, LINER CATHOD FULL FLOW OXIDE ETCH
|
03-12 |
2224 |
653 |
AMAT, 0040-02609, Lower liner with magnet
|
03-12 |
2179 |
652 |
AMAT, 0040-33998, Process outer can
|
03-12 |
2261 |
651 |
AMAT, 0021-06092, Slit valve liner door
|
03-12 |
2232 |
650 |
AMAT, 0040-31942, MXP+ Chamber body
|
03-12 |
2294 |
649 |
AMAT, 0020-33164, HOUSING, THROTTLE VALVE, METCH MXP CENTURA
|
03-12 |
2110 |
648 |
AMAT, 0200-39361, ISOLATOR SILANE PUMPING RING PRODUCER
|
03-12 |
2124 |
647 |
LAM, 715-011001-002, HOUSING UPPER REACTION CHAMBER
|
03-12 |
2101 |
646 |
AMAT, 0021-10223, Outer chamber liner
|
03-12 |
2124 |