|
626 |
LAM, 715-031454-001, Side plate
 |
10-06 |
2509 |
|
625 |
LAM, 715-028459-001, Lower Seal Plate
|
10-06 |
2393 |
|
624 |
LAM, 715-330834-001, HSG, LWR reaction chamber
|
10-06 |
2251 |
|
623 |
LAM, 16-435080-00, SHWRHD, 300MM, 15 INCH, TC, TAPERED
|
09-07 |
2316 |
|
622 |
VAT P/N, 65048-PH52-ADR1, CONTROL PENDULUM VALVE, VAT VALVE
|
09-07 |
2288 |
|
621 |
LAM, 853-052158-020, SI, ASSY, OUTER ELECTRODE, ABE TYPE, 12…
|
09-05 |
2266 |
|
620 |
LAM, 853-052157-010, SI, ASSY INNER ELECTRODE, ABE TYPE, 12 …
|
09-05 |
2110 |
|
619 |
TEL, 3D05-200094-12, SI, RING, SHIELD UPPER, 300MM
|
09-05 |
2205 |
|
618 |
TEL, 3D05-300243-11, SI, COVER RING, 12 INCH
|
09-05 |
2154 |
|
617 |
TEL, 3D10-302020-11, SI, CATHODE, 12 INCH, SCCM
|
09-05 |
2160 |
|
616 |
TEL, 3D10-250203-11, SI, RING GROUND GROOVE, 12 INCH
|
09-05 |
2306 |
|
615 |
TEL, 3D10-251193-11, FOCUS RING, 12 INCH
|
09-05 |
2392 |
|
614 |
TEL, 3D87-003411-14, CELL BODY ASSY, SCCM-OX, 12INCH
|
09-05 |
2425 |
|
613 |
TEL, 2L10-252017-11, SI, FOCUS RING, 12 INCH
|
09-05 |
2406 |
|
612 |
TEL, 2L10-250520-11, SI VIGUS PX INNER CEL, 12 INCH
|
09-05 |
2360 |
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