|
615 |
TEL, 3D10-250203-11, SI, RING GROUND GROOVE, 12 INCH
 |
09-05 |
2556 |
|
614 |
TEL, 3D10-251193-11, FOCUS RING, 12 INCH
|
09-05 |
2631 |
|
613 |
TEL, 3D87-003411-14, CELL BODY ASSY, SCCM-OX, 12INCH
|
09-05 |
2685 |
|
612 |
TEL, 2L10-252017-11, SI, FOCUS RING, 12 INCH
|
09-05 |
2648 |
|
611 |
TEL, 2L10-250520-11, SI VIGUS PX INNER CEL, 12 INCH
|
09-05 |
2629 |
|
610 |
TEL, 1D85-010783-13, ESC, 200MM, SCCM, TEL
|
09-05 |
2607 |
|
609 |
LAM, 15-112705-00, CAP RETAINER, VECTOR
|
09-05 |
2585 |
|
608 |
LAM, 15-112704-00, HOLDER LIFT PIN, VECTOR
|
09-05 |
2894 |
|
607 |
LAM, 716-003543-123, RING,HOT EDGE,SI,DUAL SLOPE, 12 INCH
|
09-05 |
2622 |
|
606 |
LAM, 839-044157-431, ASSY, SILICON CATHODE, 17 INCH
|
09-05 |
2632 |
|
605 |
LAM, 839-020965-005, ASSY, ELCTD, OUTER
|
09-05 |
2482 |
|
604 |
LAM, 839-021113-002, ASSY, LECTD, INNER, TC
|
09-05 |
2319 |
|
603 |
AMAT, 0040-33215, LASED, PEDESTAL, 300MM DPS II
|
09-05 |
2338 |
|
602 |
AMAT, 0040-54755, CERAMIC ESC, 200MM DPS II, SNNF
|
09-05 |
2404 |
|
601 |
AMAT, 0040-48594, ESC TESTED 300MM DUAL HE HDPCVD
|
09-05 |
2344 |
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