|
381 |
AMAT, 0200-01463, QUARTZ SHADOW RING
 |
01-26 |
4243 |
|
380 |
AMAT, 0200-02124, QUARTZ COVER RING
|
01-26 |
4377 |
|
379 |
AMAT, 0200-00207, TIP, SUSCEPTOR SHAFT, OUTSIDE
|
01-18 |
4465 |
|
378 |
LAM, 716-022030-004, STEPPED PIN DC BIAS
|
01-12 |
4591 |
|
377 |
LAM, 716-058179-007, QUARTZ COVER RING
|
01-12 |
4384 |
|
376 |
LAM, 716-045265-424, EXHAUST GROUND COVER
|
01-12 |
4404 |
|
375 |
LAM, 716-067739-106, QUARTZ COVER BKGP
|
01-12 |
4390 |
|
374 |
LMA, 716-017112-522, WAP RING
|
01-12 |
4407 |
|
373 |
LAM, 716-014843-300, CONFINEMENT RING
|
01-12 |
4371 |
|
372 |
LAM, 857-120208-010, GASKET SET, TP TO CHOKE
|
01-09 |
4246 |
|
371 |
LAM, 857-120209-009, GASKET SET, CHOKE TO HTR
|
01-09 |
4366 |
|
370 |
LAM, 857-120210-008, GASKET SET, HTR TO BP
|
01-09 |
4441 |
|
369 |
AMAT, 0200-03319, EDGE RING OXIDIZED UNIRING 300MM RADIANC
|
12-30 |
4675 |
|
368 |
LAM, 02-298156-00, HEATER PEDESTAL 300MM ASSY
|
12-29 |
4703 |
|
367 |
LAM, 02-298157-00, HEATER PEDESTAL BLOCK
|
12-29 |
4417 |
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