|
210 |
TEL, 1810-222191-11, QUARTZ FOCUS RING, TEL
 |
01-12 |
212 |
|
209 |
TEL, 1810-221048-13, QUARTZ SHIELD RING, TEL
|
01-12 |
214 |
|
208 |
TEL, 2L10-255346-11, FOCUS RING, TEL
|
01-12 |
154 |
|
207 |
AMAT, 0040-35049, CLAMP RING LOWER
|
01-12 |
155 |
|
206 |
AMAT, 0040-06477, CLAMP RING UPPER RP
|
01-12 |
182 |
|
205 |
AMAT, 0040-35140, CLAMP RING UPPER ATM
|
01-12 |
187 |
|
204 |
AMAT, 0040-46460, BASE PLATE CHAMBER
|
01-08 |
250 |
|
203 |
LAM, 839-019080-608, ESC, TUNABLE MZ 300MM, E-BAND TYPE, LAM
|
12-30 |
329 |
|
202 |
AMAT, 0200-35019, INSERT INJECT 4 ZONE
|
12-28 |
225 |
|
201 |
AMAT, 0200-05396, INSERT INJECT 4 ZONE
|
12-28 |
270 |
|
200 |
AMAT, 0200-35050, INSERT INJECT 2 ZONE
|
12-28 |
215 |
|
199 |
AMAT, 0200-35916, INSERT INJECT 3 ZONE
|
12-27 |
178 |
|
198 |
MATTSON, 58700015, PROCESS TUBE RTP 2900 MATTSON
|
12-16 |
209 |
|
197 |
VAT, 65040-PAHV-APW1, VAT VALVE, ASPEN3, MATTSON
|
11-02 |
1256 |
|
196 |
LAM, 716-042579-301, RING, CONF, TWIST TOP, OUTER, 300MM R
|
08-26 |
198 |
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