|
221 |
AMAT, 0040-35095, CHILL PLATE UPPER REFLECTOR, EPI
 |
01-20 |
4472 |
|
220 |
AMAT, 0040-35452, CHILL PLATE RH, LOWER REFLECTOR, EPI
|
01-20 |
4366 |
|
219 |
AMAT, 0040-35451, CHILL PLATE LH, LOWER REFLECTOR, EPI
|
01-20 |
4358 |
|
218 |
AMAT, 0010-25739, HY11 MAGNET ASSY, DS-TTN 300MM
|
01-19 |
4444 |
|
217 |
EDWARDS, STP-XA2703CV, EDWARDS TMP
|
01-18 |
4410 |
|
216 |
LAM, 716-042579-301, RING, CONF, TWIST TOP, OUTER, 300MM R
|
01-14 |
4396 |
|
215 |
LAM, 716-042580-300, RING, CONF, INNER BYPASS, 300MM
|
01-14 |
4564 |
|
214 |
LAM, 716-013344-006, RING, COVER, OUTER, GND
|
01-14 |
4547 |
|
213 |
LAM, 716-030135-001, EDGE RING, 8 INCH, NOTCH
|
01-14 |
4645 |
|
212 |
AMAT, 0200-02396, LINER CERAMIC MIDDLE PRODUCER SE
|
01-14 |
4883 |
|
211 |
AMAT, 0200-02395, TOP, CERAMIC LINER, AMAT
|
01-14 |
4886 |
|
210 |
TEL, 1810-222191-11, QUARTZ FOCUS RING, TEL
|
01-12 |
5061 |
|
209 |
TEL, 1810-221048-13, QUARTZ SHIELD RING, TEL
|
01-12 |
5287 |
|
208 |
TEL, 2L10-255346-11, FOCUS RING, TEL
|
01-12 |
5247 |
|
207 |
AMAT, 0040-35049, CLAMP RING LOWER
|
01-12 |
5206 |
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