|
206 |
AMAT, 0040-06477, CLAMP RING UPPER RP
 |
01-12 |
5325 |
|
205 |
AMAT, 0040-35140, CLAMP RING UPPER ATM
|
01-12 |
5467 |
|
204 |
AMAT, 0040-46460, BASE PLATE CHAMBER
|
01-08 |
5620 |
|
203 |
LAM, 839-019080-608, ESC, TUNABLE MZ 300MM, E-BAND TYPE, LAM
|
12-30 |
5916 |
|
202 |
AMAT, 0200-35019, INSERT INJECT 4 ZONE
|
12-28 |
5449 |
|
201 |
AMAT, 0200-05396, INSERT INJECT 4 ZONE
|
12-28 |
5392 |
|
200 |
AMAT, 0200-35050, INSERT INJECT 2 ZONE
|
12-28 |
5359 |
|
199 |
AMAT, 0200-35916, INSERT INJECT 3 ZONE
|
12-27 |
5311 |
|
198 |
MATTSON, 58700015, PROCESS TUBE RTP 2900 MATTSON
|
12-16 |
5514 |
|
197 |
VAT, 65040-PAHV-APW1, VAT VALVE, ASPEN3, MATTSON
|
11-02 |
7160 |
|
196 |
LAM, 716-042579-301, RING, CONF, TWIST TOP, OUTER, 300MM R
|
08-26 |
5415 |
|
195 |
LAM, 716-042580-300, RING, CONF, INNER BYPASS, 300MM
|
08-26 |
5711 |
|
194 |
LAM, 716-013344-006, RING, COVER, OUTER, GND
|
08-26 |
5694 |
|
193 |
LAM, 15-291800-00, BELL JAR, QUARTZ, 12IN, G-XPRS
|
08-02 |
5556 |
|
192 |
AMAT, 0020-76314, LID TRANSFER CHAMBER
|
07-29 |
5630 |
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