|
152 |
AMAT, 0020-84596, SHOWERHEAD, 300MM
 |
07-13 |
5707 |
|
151 |
LAM, 15-304718-00, SHWRHD, THIN WALL, DROP-IN, G-XPR
|
07-03 |
6221 |
|
150 |
AMAT, 0041-37448, CLAMP RING, UPPER ATM
|
06-14 |
6445 |
|
149 |
AMAT, 0040-84465, CAP INJECT MACHINED, 3 ZONE
|
06-12 |
6116 |
|
148 |
LAM, 715-030319-001, COV, SCR, BOT R, BSR
|
05-29 |
6272 |
|
147 |
LAM, 715-012233-007, GATE, INNER, W O-RING
|
05-29 |
6005 |
|
146 |
AMAT, 0040-35365, CAP, INJECT MACHINED, 3 ZONE
|
05-21 |
5917 |
|
145 |
AMAT, 0040-34815, CLEANED INJECT CAP
|
05-21 |
5832 |
|
144 |
TEL, 1880-026696-12, TEL Si electrode
|
05-21 |
6042 |
|
143 |
AMAT, 0021-00571, Insert Chamber Exhaust EPI 200mm SST
|
05-17 |
5864 |
|
142 |
LAM, 715-330180-001, ELCTD, BOT, FXD GAP ESC, LOW TEMP
|
05-16 |
6008 |
|
141 |
LAM, 713-037072-007, HANGER
|
05-15 |
6214 |
|
140 |
AMAT, 0200-50107, MODIFY SINGLE RING DPS NOTCH
|
05-01 |
6024 |
|
139 |
AMAT, 0020-35818, PLATE COOLDOWN PEDESTAL
|
04-26 |
6179 |
|
138 |
LAM, 715-032012-006, PL, WDO, CHMBR, CAPTIVE, HDW
|
04-22 |
6296 |
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