|
71 |
AMAT, 0020-37026, BASE SUSCEPTOR LIFT SHAFT
 |
12-18 |
5115 |
|
70 |
AMAT, 0020-36817, HOUSING ROTATION. R3 MAG. COUPLED
|
12-18 |
5019 |
|
69 |
AMAT, 0020-36713, SPACER, BEARING ROT 3.2
|
12-18 |
4953 |
|
68 |
AMAT, 0020-36470, SPACER BEARING ASD 5200 ROTATION
|
12-18 |
5049 |
|
67 |
AMAT, 0020-36362, COVER BEARING R3 ROTATION
|
12-18 |
4859 |
|
66 |
AMAT, 0020-36033, COUPLING MAGNETIC ROTATION
|
12-18 |
4800 |
|
65 |
AMAT, 0020-36032, HOUSING ISOLATION MAG COUPLED ROTATION
|
12-18 |
4571 |
|
64 |
AMAT, 0020-36031, HOUSING MAGNETICALLY COUPLED ROTATION
|
12-18 |
4651 |
|
63 |
AMAT, 0020-36030, HOUSING UPPER WAFER LIFT
|
12-18 |
4753 |
|
62 |
AMAT, 0020-36029, SHAFT MAG COUPLED ROTATION
|
12-18 |
4787 |
|
61 |
AMAT, 0020-36028, FLAG OPTO SENSOR
|
12-18 |
4683 |
|
60 |
AMAT, 0020-36026, BRACKET LOCATING ROTATION ARM
|
12-18 |
4851 |
|
59 |
AMAT, 0020-36022, SHAFT TRAVEL ADJUSTMENT MAG COUPLED ROT
|
12-18 |
4828 |
|
58 |
AMAT, 0020-36019, BRACKET WAFER LIFT MAG COUPLED ROTATION
|
12-18 |
4933 |
|
57 |
AMAT, 0020-36018, BRACKET SUPPORT TO UPPER CYLINDER
|
12-18 |
4952 |
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