|
45 |
LAM, 839-800327-315, ESC 300mm, CER, BI, IMB BIG PIN
 |
09-19 |
5324 |
|
44 |
AMAT, 0040-35161, DUCT 6 INCH DEPOSITION CHAMBER
|
09-11 |
5185 |
|
43 |
AMAT, E11120441, MANIPULATOR, ASSY, VIISTA810EHP, AMAT
|
09-04 |
5356 |
|
42 |
AMAT, E11051221, ROPLAT, ECLAMP DRIVE, E500
|
09-04 |
5316 |
|
41 |
AMAT, 0040-88340, UPPER CHAMBER LINER THICK, 300MM, DPS2
|
08-02 |
5398 |
|
40 |
AMAT, 0020-03658, CLAMPING CYLINDER
|
07-25 |
5185 |
|
39 |
AMAT, 0040-35095, CHILL PLATE UPPER REFLECTOR
|
07-18 |
5307 |
|
38 |
AMAT, 0040-35452, CHILL PLATE RH, LOWER REFLECTOR
|
07-18 |
5178 |
|
37 |
AMAT, 0040-35451, CHILL PLATE LH, LOWER REFLECTOR
|
07-18 |
5300 |
|
36 |
AMAT, 0040-38488, AIR SHROUD, UPPER
|
04-25 |
5364 |
|
35 |
EDWARDS, STP-XA2703BV80, EDWARDS TMP
|
04-11 |
5472 |
|
34 |
LAM, 716-082886-006, GAS INJECTOR
|
04-06 |
5566 |
|
33 |
MATTSON, 304-05257-00, LID, COVER A3 CVD
|
03-28 |
5490 |
|
32 |
AMAT, 0040-02751, AIR SHROUD LOWER
|
02-14 |
5430 |
|
31 |
LAM, 716-028553-104, CONFINEMENT RING
|
02-09 |
5662 |
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