|
150 |
AMAT, 0041-37448, CLAMP RING, UPPER ATM
 |
06-14 |
196 |
|
149 |
AMAT, 0040-84465, CAP INJECT MACHINED, 3 ZONE
|
06-12 |
266 |
|
148 |
LAM, 715-030319-001, COV, SCR, BOT R, BSR
|
05-29 |
334 |
|
147 |
LAM, 715-012233-007, GATE, INNER, W O-RING
|
05-29 |
259 |
|
146 |
AMAT, 0040-35365, CAP, INJECT MACHINED, 3 ZONE
|
05-21 |
340 |
|
145 |
AMAT, 0040-34815, CLEANED INJECT CAP
|
05-21 |
292 |
|
144 |
TEL, 1880-026696-12, TEL Si electrode
|
05-21 |
289 |
|
143 |
AMAT, 0021-00571, Insert Chamber Exhaust EPI 200mm SST
|
05-17 |
255 |
|
142 |
LAM, 715-330180-001, ELCTD, BOT, FXD GAP ESC, LOW TEMP
|
05-16 |
259 |
|
141 |
LAM, 713-037072-007, HANGER
|
05-15 |
278 |
|
140 |
AMAT, 0200-50107, MODIFY SINGLE RING DPS NOTCH
|
05-01 |
318 |
|
139 |
AMAT, 0020-35818, PLATE COOLDOWN PEDESTAL
|
04-26 |
329 |
|
138 |
LAM, 715-032012-006, PL, WDO, CHMBR, CAPTIVE, HDW
|
04-22 |
533 |
|
137 |
LAM, 715-031986-008, HSG, LWR REAC CHMBR
|
04-22 |
304 |
|
136 |
LAM, 715-032012-003, PL, WDO, CHMBR, CAPTIVE, HDW
|
04-15 |
356 |
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