550 |
LAM, 716-028487-004, TOP CONFINEMENT RING, 6", CERAMIC
|
02-04 |
4058 |
549 |
LAM, 716-140139-001, RING, HOT EDGE, HIGH WALL, ESC 8"
|
02-11 |
3733 |
548 |
AMAT, 0021-09625, LOWER CHAMBER, DPS, AMAT
|
02-11 |
3616 |
547 |
LAM, 715-130079-008, HLDR, WAF, 8 INCH, ISO, BOT CLP RDC
|
02-12 |
3575 |
546 |
LAM, 715-140166-003, ELCTD, BOT, CER ESC, OXD
|
02-12 |
3746 |
545 |
AMAT, 0010-33889, Magnet Assy Durasource TTN Encasulated G-t…
|
02-17 |
3708 |
544 |
VAT P/N, 65048-PH52-ADR1, CONTROL PENDULUM VALVE, VAT VALVE
|
02-17 |
3767 |
543 |
AMAT, 0010-25739, HY11 MAGNET ASSY, DS-TTN 300MM
|
02-18 |
3691 |
542 |
AMAT, 0010-03487, 300mm, Endura II TTN magnet assy
|
02-18 |
3690 |
541 |
LAM, 715-140125-001, BAFFLE LOWER
|
03-04 |
4019 |
540 |
LAM, 715-140126-001, BAFFLE UPPER
|
03-04 |
4221 |
539 |
LAM, 715-140124-001, FACING SEAL PLATE
|
03-04 |
4175 |
538 |
MATTSON, 162-00001-00, HEATER BLOCK (ASPEN II)
|
05-07 |
4074 |
537 |
LAM, 715-443223-002, RING, GROUND, AL HP
|
05-18 |
4121 |
536 |
AMAT, 0021-35008, PLATE, REFLECTOR, 200MM
|
05-27 |
4217 |