70 |
AMAT, 0020-36817, HOUSING ROTATION. R3 MAG. COUPLED
|
12-18 |
3778 |
69 |
AMAT, 0020-36713, SPACER, BEARING ROT 3.2
|
12-18 |
3605 |
68 |
AMAT, 0020-36470, SPACER BEARING ASD 5200 ROTATION
|
12-18 |
3618 |
67 |
AMAT, 0020-36362, COVER BEARING R3 ROTATION
|
12-18 |
3526 |
66 |
AMAT, 0020-36033, COUPLING MAGNETIC ROTATION
|
12-18 |
3573 |
65 |
AMAT, 0020-36032, HOUSING ISOLATION MAG COUPLED ROTATION
|
12-18 |
3482 |
64 |
AMAT, 0020-36031, HOUSING MAGNETICALLY COUPLED ROTATION
|
12-18 |
3569 |
63 |
AMAT, 0020-36030, HOUSING UPPER WAFER LIFT
|
12-18 |
3597 |
62 |
AMAT, 0020-36029, SHAFT MAG COUPLED ROTATION
|
12-18 |
3692 |
61 |
AMAT, 0020-36028, FLAG OPTO SENSOR
|
12-18 |
3589 |
60 |
AMAT, 0020-36026, BRACKET LOCATING ROTATION ARM
|
12-18 |
3671 |
59 |
AMAT, 0020-36022, SHAFT TRAVEL ADJUSTMENT MAG COUPLED ROT
|
12-18 |
3590 |
58 |
AMAT, 0020-36019, BRACKET WAFER LIFT MAG COUPLED ROTATION
|
12-18 |
3665 |
57 |
AMAT, 0020-36018, BRACKET SUPPORT TO UPPER CYLINDER
|
12-18 |
3632 |
56 |
AMAT, 0020-36017, SUPPORT ROTATION HOUSING AND BEARING
|
12-18 |
3727 |