EPI PARTS | EPI consumable parts, 8", AMAT
본문
1. P/N: 0040-35049, CLAMP RING, LOWER.
2. P/N: 0020-64327, HOUSING GRIP ACTION.
3. P/N: 0040-35140, CLAMP RING, UPPER, ATM
4. P/N: 0040-35132, BASE PLATE, CHAMBER.
5. P/N: 0040-06477, CLAMP RING, UPPER, RP
6. P/N: 0040-46908, COVER, BASE PLATE, EXHAUST TOP
7. P/N: 0040-46907, COVER, BASE PLATE, EXHAUST BOT
8. P/N: 0040-46460, PLATE BASE DEPO CHAMBER