1. P/N: 839-330743-003, BELLOW, BOTTOM ROD LIFTER, LAM

2. P/N: 0040-99867, Bellows, Lift pin, AXIOM, AMAT

3. P/N: 0040-87358, Bellows, SV Door W/Ball bearing, AMAT

4. P/N: 0041-27188, Bellows assy, slit v/v door, DPS2, AMAT

5. P/N: 0041-27208, Bellows, Lift pin, ETCH CH, AMAT 

6. P/N: 0040-80830, BELLOWS,FINGER LIFT,HASTALLOY,PRODUCER, AMAT

7. P/N: 0040-39946, BELLOWS,  FINGER LIFT, HASTALLOY PRODUCER, AMAT

8. P/N: 0040-36095, BELLOWS,  HEATER LIFT DCVD, AMAT