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Product Main products

Main products

EPI PARTS |   EPI consumable parts, 8", AMAT 

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1. P/N: 0040-35049, CLAMP RING, LOWER.

2. P/N: 0020-64327, HOUSING GRIP ACTION.

3. P/N: 0040-35140, CLAMP RING, UPPER, ATM

4. P/N: 0040-35132, BASE PLATE, CHAMBER.

5. P/N: 0040-06477, CLAMP RING, UPPER, RP

6. P/N: 0040-46908, COVER, BASE PLATE, EXHAUST TOP

7. P/N: 0040-46907, COVER, BASE PLATE, EXHAUST BOT

8. P/N: 0040-46460, PLATE BASE DEPO CHAMBER

    

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